JPH0368044U - - Google Patents
Info
- Publication number
- JPH0368044U JPH0368044U JP12930389U JP12930389U JPH0368044U JP H0368044 U JPH0368044 U JP H0368044U JP 12930389 U JP12930389 U JP 12930389U JP 12930389 U JP12930389 U JP 12930389U JP H0368044 U JPH0368044 U JP H0368044U
- Authority
- JP
- Japan
- Prior art keywords
- test object
- frequency heating
- thermal cycle
- internal pressure
- cooling medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12930389U JPH0368044U (en]) | 1989-11-07 | 1989-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12930389U JPH0368044U (en]) | 1989-11-07 | 1989-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0368044U true JPH0368044U (en]) | 1991-07-03 |
Family
ID=31676942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12930389U Pending JPH0368044U (en]) | 1989-11-07 | 1989-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0368044U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019049418A (ja) * | 2017-09-08 | 2019-03-28 | 国立大学法人 名古屋工業大学 | 熱サイクル試験装置、熱サイクル試験方法、半導体装置の製造方法、及びプログラム |
-
1989
- 1989-11-07 JP JP12930389U patent/JPH0368044U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019049418A (ja) * | 2017-09-08 | 2019-03-28 | 国立大学法人 名古屋工業大学 | 熱サイクル試験装置、熱サイクル試験方法、半導体装置の製造方法、及びプログラム |